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		<title>Air on Radiant Infrared Heating</title>
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				<title>Infrared lamp with air knife unit</title>
				<link>http://radiant-ir-heater.com/en/posts/infrared-lamp-with-air-knife-unit/</link>
				<pubDate>Thu, 25 Jun 2026 01:38:41 +0800</pubDate>
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				<description>&lt;p&gt;&lt;img src=&#34;http://radiant-ir-heater.com/images/0ea7296bcdd661f341d1983d454c4037.png&#34; alt=&#34;Infrared lamp with air knife unit&#34;&gt;&lt;/p&gt;&#xA;&lt;p&gt;On the lithography floor, you know the drill: a 0.5°C drift in bake temperature and your critical dimensions shift by nanometers. That’s a whole lot of scrap in a hurry. We built the infrared lamp with an air knife unit to keep the thermal line where it has to be—on the wafer, across the field, shift after shift.&lt;/p&gt;&#xA;&lt;h2 id=&#34;infrared-heating-precision-sub-millimeter-uniformity-and-repeatability&#34;&gt;Infrared heating precision: sub-millimeter &lt;a href=&#34;https://henruite.com&#34;&gt;uniformity&lt;/a&gt; and repeatability&lt;/h2&gt;&#xA;&lt;p&gt;The system leans on short-wave NIR emitters to dump energy straight into the photoresist, fast. Closed-loop control holds the setpoint within ±0.1°C. The quartz-based design keeps the thermal profile stable and repeatable, and sub-millimeter uniformity across the wafer cuts edge bead and sharpens pattern fidelity.&#xA;The integrated air knife throws a laminar, high-velocity curtain across the surface. It strips moisture and particles without touching the wafer, so you can run in Class 1–100 cleanrooms and keep particle counts down.&lt;/p&gt;</description>
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