Coater developer infrared heater
On the lithography floor, a 0.5°C drift in soft bake or hard bake isn’t a “small deviation.” It’s yield bleeding away—plain to see in the CD...
Spin coater bake lamp
On the lithography floor, the bake isn’t a pause—it’s the line in the sand. Soft bake drives off the photoresist solvent. Hard bake locks in the mask...