http://radiant-ir-heater.com/zh/tags/%E5%85%89%E5%88%BB%E8%83%B6/ Recent content in 光刻胶 on Radiant Infrared Heating Hugo zh Thu, 18 Jun 2026 01:20:34 +0800 http://radiant-ir-heater.com/zh/posts/effective-photoresist-bake-with-ir/ Thu, 18 Jun 2026 01:20:34 +0800 http://radiant-ir-heater.com/zh/posts/effective-photoresist-bake-with-ir/ <p><img src="http://radiant-ir-heater.com/images/016cf4f616aaa15e4af48856b8adc51b.png" alt="利用红外线实现有效的光刻胶烘烤"></p> <p>在光刻工艺中，烘烤温度只要出现0.5°C的偏差，就足以导致整批产品报废。所谓“软烘烤”，其实就是让溶剂充分蒸发；而“硬烘烤”则是为了固定产品的尺寸参数。一旦温度均匀性出现问题，CD控制就会失灵，颗粒数量也会随之增加。</p>