http://radiant-ir-heater.com/zh/tags/%E5%BE%AE%E6%9C%BA%E7%94%B5%E7%B3%BB%E7%BB%9F/ Recent content in 微机电系统 on Radiant Infrared Heating Hugo zh Fri, 24 Jul 2026 09:26:24 +0800 http://radiant-ir-heater.com/zh/posts/why-infrared-curing-is-the-standard-for-lead-free-mems-wafer-drying/ Fri, 24 Jul 2026 09:26:24 +0800 http://radiant-ir-heater.com/zh/posts/why-infrared-curing-is-the-standard-for-lead-free-mems-wafer-drying/ <p><img src="http://radiant-ir-heater.com/images/0ea7296bcdd661f341d1983d454c4037.png" alt="MEMS传感器晶圆干燥加热器"></p> <p>如何让MEMS晶圆在干燥过程中不受损害？<br> 在制造MEMS传感器时，最不希望看到的就是有水滴或溶剂残留，因为这些会毁掉整个生产过程。不过，问题在于：我们必须在不损害材料、也不让杂质进入的情况下，将晶圆彻底干燥。</p>