Effective photoresist bake with IR
On the lithography floor, a 0.5°C drift in bake temperature is enough to scrap an entire lot. Soft bake is about pulling solvent out cleanly; hard...
Spin coater bake lamp
On the lithography floor, the bake isn’t a pause—it’s the line in the sand. Soft bake drives off the photoresist solvent. Hard bake locks in the mask...